Research progress on prevention and control technology of poison in cleanrooms

While cleanrooms are widely used in many industries including electronics, medicine and biology, the prevention and control of occupational hazards has become increasingly prominent, especially occupational damage caused by productive toxicants. Briefly presents the source of poisons in cleanrooms, and expounds the research progress on prevention and control technology of poison in cleanrooms from two aspects of source control and improvement of the air conditioning and cleaning system (including controlling airflow pattern, controlling outdoor air rate, using chemical filters).